Metal working – Method of mechanical manufacture – Assembling or joining
Patent
1980-03-21
1983-02-08
Ozaki, G.
Metal working
Method of mechanical manufacture
Assembling or joining
29577C, 29591, H01L 2128
Patent
active
043720315
ABSTRACT:
Semiconductor read only memory (ROM) or electrically programmable memory (EPROM) devices are constructed using a metal-to-silicon contact arrangement which provides small cell size. An intervening polysilicon segment allows the silicon region underlying a metal contact area to be much smaller than in prior cells. The layout and cell structure provides a high density array. The use of the polysilicon segment also prevents the occurance of problems with spiking of metal through shallow implanted N+ regions.
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Kuo Chang-Kiang
Tsaur Shyh-Chang
Graham John G.
Ozaki G.
Texas Instruments Incorporated
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