Flow sensor

Details Flow sensor Flow sensor

1989-08-01

1991-07-23

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

050332996

ABSTRACT:
A flow sensor comprising a heating unit and a fluid temperature detecting unit, the heating unit including a heat element, the fluid temperature detecting unit including a fluid temperature detecting element, the elements being formed on at least one substrate made of zirconia that is a heat insulating material having low thermal conductivity, great mechanical strength, and high heat-resistance.

REFERENCES:
patent: 4304130 (1981-12-01), Peter et al.
patent: 4399697 (1983-08-01), Kohama et al.
patent: 4549433 (1985-10-01), Gneiss et al.
patent: 4559814 (1985-12-01), Sato et al.
patent: 4761995 (1988-08-01), Ohta et al.
patent: 4881407 (1989-11-01), Tashahashi et al.

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