Graytone mask and method thereof

Details Graytone mask and method thereof Graytone mask and method thereof

2002-06-13

2010-06-29

Trinh, Hoa B (Department: 2893)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

With reflector, opaque mask, or optical element integral...

C257SE21023, C438S942000, C430S005000

Reexamination Certificate

active

07745842

ABSTRACT:
A transmissivity controlled film12(CrO or the like), a transmissivity reduced film13(Cr or the like), and a resist film14, for instance, are sequentially formed on, e.g., a transparent substrate11. A resist is removed from an area (an area C) where a light-transmission section is to be formed, and the transmissivity reduced film13and the transmissivity controlled film12are removed from the area, thereby forming a light-transmission section. Next, a resist is removed from an area (an area A) in which a graytone section is to be formed, thereby removing the transmissivity reduced film13from that area, to thereby form a graytone section. Thus, a graytone mask is manufactured.

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Technical Report of FPD Intelligence 1999.

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