Method of manufacturing a liquid transporting apparatus

Details Method of manufacturing a liquid transporting apparatus Method of manufacturing a liquid transporting apparatus

2005-08-30

2010-06-22

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C427S100000, C347S071000, C310S324000, C310S331000

Reexamination Certificate

active

07739777

ABSTRACT:
A method of manufacturing an ink-jet head according to the present invention includes a step of providing a vibration plate in which grooves associated with respective pressure chambers are formed on a surface of the vibration plate, and a piezoelectric layer forming step of forming a piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on an opposite side of a channel unit. Since grooves corresponding to the grooves in the vibration plate are formed also in the piezoelectric layer, it is possible to reduce a cross talk between operating sections of the piezoelectric layer. Further, chip and crack is hardly developed in the piezoelectric layer.

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