Hazardous or toxic waste destruction or containment – Containment – Solidification – vitrification – or cementation
Patent
1995-06-07
1999-03-02
Tsang, Cecilia J.
Hazardous or toxic waste destruction or containment
Containment
Solidification, vitrification, or cementation
588205, 588206, 588212, 588247, 210748, 20415715, 20415741, 20415745, 20415748, 20415764, 2041582, 20415821, A62D 300
Patent
active
058773924
ABSTRACT:
A method and apparatus to decompose nonhydrolyzable ambients such as chlorofluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photo-decomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication.
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Russell Stephen D.
Sexton Douglas A.
Fendelman Harvey
Keough Thomas Glenn
Muirheid C. Delacroix
The United States of America as represented by the Secretary of
Tsang Cecilia J.
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