Method for manufacturing metal-insulator-metal capacitor

Details Method for manufacturing metal-insulator-metal capacitor Method for manufacturing metal-insulator-metal capacitor

2008-06-24

2010-11-02

Arbes, C. J (Department: 3729)

Metal working

Electric condenser making

C029S025420, C029S830000, C029S846000

Reexamination Certificate

active

07823260

ABSTRACT:
A method of manufacturing a metal-insulator-metal (MIM) capacitor that includes at least one of the following steps: Sequentially forming a bottom metal film, an insulating film, and a top metal film over a wafer. Forming a first pattern for etching the top metal film and the insulating film. Etching the top metal film and the insulating film, using the formed first pattern, and then stripping the first pattern. Conducting a heat treatment and a cooling split for the wafer. Forming a metal pattern for etching the bottom metal film. Etching the bottom metal film, using the formed metal pattern, and then stripping the metal pattern.

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