Stage device

Registers – Coded record sensors – Holding devices

Reexamination Certificate

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Reexamination Certificate

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07743998

ABSTRACT:
A stage device has guide members (2, 3) for guiding each of two moving bodies (4, 5) in one axis direction on a level block (1) and has a beam (6) laid across the two moving bodies (4, 5) so as to be perpendicular to the guide members (2, 3) and moving together with the moving bodies (4, 5). The two moving bodies (4, 5) are individually moved to rotate the beam (6) relative to a yaw rotation axis perpendicular to the one axis direction.

REFERENCES:
patent: 3857075 (1974-12-01), Sawyer
patent: 5015936 (1991-05-01), Inoue
patent: 5539532 (1996-07-01), Watanabe
patent: 61-117034 (1986-06-01), None
patent: 2000-29530 (2000-01-01), None
patent: 2000-65970 (2000-03-01), None
patent: 2000-155186 (2000-06-01), None
patent: 2000-356693 (2000-12-01), None
patent: 2001-22448 (2001-01-01), None
patent: 2003-25178 (2003-01-01), None
patent: 2004-9176 (2004-01-01), None

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