Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-12-01
2010-11-30
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07843550
ABSTRACT:
In the inspection apparatus of this projection optical system, a folding glass member, comprising a flat surface part and a reflecting spherical surface part opposing to the flat surface part, is disposed on the image plane side of the projection optical system so that the flat surface part opposes to the projection optical system. Further, in a state wherein a liquid is supplied between the projection optical system and the folding glass member, a measuring beam emitted from an interferometer unit enters the projection optical system; the measuring beam that transmitted through the projection optical system and the liquid, and entered the folding glass member is reflected by the reflecting spherical surface part, and once again passes through the liquid and the projection optical system; and the interference fringes obtained from the measuring beam and the reference beam generated within the interferometer unit are detected.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 6650399 (2003-11-01), Baselmans et al.
patent: 6785006 (2004-08-01), Nishida
patent: 6961115 (2005-11-01), Hamatani et al.
patent: 7213963 (2007-05-01), Lof et al.
patent: 7227616 (2007-06-01), Graeupner
patent: 7301607 (2007-11-01), Hazelton et al.
patent: 7486380 (2009-02-01), Hazelton et al.
patent: 2002/0101574 (2002-08-01), Tsuji
patent: 2002/0118370 (2002-08-01), Nishida
patent: 2002/0159040 (2002-10-01), Hamatani et al.
patent: 2002/0163629 (2002-11-01), Switkes et al.
patent: 2002/0167642 (2002-11-01), Jones et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0174408 (2003-09-01), Rostalski et al.
patent: 2004/0000627 (2004-01-01), Schuster
patent: 2004/0075895 (2004-04-01), Lin
patent: 2004/0109237 (2004-06-01), Epple et al.
patent: 2004/0114117 (2004-06-01), Bleeker
patent: 2004/0118184 (2004-06-01), Violette
patent: 2004/0119954 (2004-06-01), Kawashima et al.
patent: 2004/0125351 (2004-07-01), Krautschik
patent: 2004/0136494 (2004-07-01), Lof et al.
patent: 2004/0160582 (2004-08-01), Lof et al.
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0169834 (2004-09-01), Richter et al.
patent: 2004/0169924 (2004-09-01), Flagello et al.
patent: 2004/0180294 (2004-09-01), Baba-Ali et al.
patent: 2004/0180299 (2004-09-01), Rolland et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0211920 (2004-10-01), Derksen et al.
patent: 2004/0224265 (2004-11-01), Endo et al.
patent: 2004/0224525 (2004-11-01), Endo et al.
patent: 2004/0227923 (2004-11-01), Flagello et al.
patent: 2004/0233405 (2004-11-01), Kato et al.
patent: 2004/0253547 (2004-12-01), Endo et al.
patent: 2004/0253548 (2004-12-01), Endo et al.
patent: 2004/0257544 (2004-12-01), Vogel et al.
patent: 2004/0259008 (2004-12-01), Endo et al.
patent: 2004/0259040 (2004-12-01), Endo et al.
patent: 2004/0263808 (2004-12-01), Sewell
patent: 2004/0263809 (2004-12-01), Nakano
patent: 2004/0269808 (2004-12-01), Sewell
patent: 2005/0002004 (2005-01-01), Kolesnychenko et al.
patent: 2005/0007569 (2005-01-01), Streefkerk et al.
patent: 2005/0007570 (2005-01-01), Streefkerk et al.
patent: 2005/0018155 (2005-01-01), Cox et al.
patent: 2005/0018156 (2005-01-01), Mulkens et al.
patent: 2005/0024609 (2005-02-01), De Smit et al.
patent: 2005/0030497 (2005-02-01), Nakamura
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0030506 (2005-02-01), Schuster
patent: 2005/0036121 (2005-02-01), Hoogendam et al.
patent: 2005/0036183 (2005-02-01), Yeo et al.
patent: 2005/0036184 (2005-02-01), Yeo et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0037269 (2005-02-01), Levinson
patent: 2005/0041225 (2005-02-01), Sengers et al.
patent: 2005/0042554 (2005-02-01), Dierichs et al.
patent: 2005/0046813 (2005-03-01), Streefkerk et al.
patent: 2005/0046934 (2005-03-01), Ho et al.
patent: 2005/0048223 (2005-03-01), Pawloski et al.
patent: 2005/0068639 (2005-03-01), Pierrat et al.
patent: 2005/0073670 (2005-04-01), Carroll
patent: 2005/0084794 (2005-04-01), Meagley et al.
patent: 2005/0094116 (2005-05-01), Flagello et al.
patent: 2005/0099635 (2005-05-01), Kakuchi et al.
patent: 2005/0100745 (2005-05-01), Lin et al.
patent: 2005/0110973 (2005-05-01), Streefkerk et al.
patent: 2005/0117224 (2005-06-01), Shafer et al.
patent: 2005/0122497 (2005-06-01), Lyons et al.
patent: 2005/0132914 (2005-06-01), Mulkens et al.
patent: 2005/0134815 (2005-06-01), Van Santen et al.
patent: 2005/0134817 (2005-06-01), Nakamura
patent: 2005/0141098 (2005-06-01), Schuster
patent: 2005/0145265 (2005-07-01), Ravkin et al.
patent: 2005/0145803 (2005-07-01), Hakey et al.
patent: 2005/0146694 (2005-07-01), Tokita
patent: 2005/0146695 (2005-07-01), Kawakami
patent: 2005/0147920 (2005-07-01), Lin et al.
patent: 2005/0153424 (2005-07-01), Coon
patent: 2005/0158673 (2005-07-01), Hakey et al.
patent: 2005/0164502 (2005-07-01), Deng et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.
patent: 2005/0175940 (2005-08-01), Dierichs
patent: 2005/0185269 (2005-08-01), Epple et al.
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0190455 (2005-09-01), Rostalski et al.
patent: 2005/0205108 (2005-09-01), Chang et al.
patent: 2005/0213061 (2005-09-01), Hakey et al.
patent: 2005/0213072 (2005-09-01), Schenker et al.
patent: 2005/0217135 (2005-10-01), O'Donnell et al.
patent: 2005/0217137 (2005-10-01), Smith et al.
patent: 2005/0217703 (2005-10-01), O'Donnell
patent: 2005/0219481 (2005-10-01), Cox et al.
patent: 2005/0219482 (2005-10-01), Baselmans et al.
patent: 2005/0219499 (2005-10-01), Zaal et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2005/0231694 (2005-10-01), Kolesnychenko et al.
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 2005/0243292 (2005-11-01), Baselmans et al.
patent: 2005/0245005 (2005-11-01), Benson
patent: 2005/0253090 (2005-11-01), Gau et al.
patent: 2005/0259232 (2005-11-01), Streefkerk et al.
patent: 2005/0259233 (2005-11-01), Streefkerk et al.
patent: 2005/0264778 (2005-12-01), Lof et al.
patent: 2005/0270505 (2005-12-01), Smith
patent: 2006/0007418 (2006-01-01), Hamatani et al.
patent: 2006/0103832 (2006-05-01), Hazelton et al.
patent: 2006/0170891 (2006-08-01), Nishinaga et al.
patent: 2006/0285100 (2006-12-01), Hamatani et al.
patent: 2007/0132979 (2007-06-01), Lof et al.
patent: 2009/0109418 (2009-04-01), Hazelton et al.
patent: 221 536 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 1 079 223 (2001-02-01), None
patent: A 57-153433 (1982-09-01), None
patent: A-57-153433 (1982-09-01), None
patent: A-58-202448 (1983-11-01), None
patent: A-59-019912 (1984-02-01), None
patent: A-59-19912 (1984-02-01), None
patent: A-62-65326 (1987-03-01), None
patent: A-62-065326 (1987-03-01), None
patent: A-63-157419 (1988-06-01), None
patent: A-04-305915 (1992-10-01), None
patent: A-4-305915 (1992-10-01), None
patent: A-04-305917 (1992-10-01), None
patent: A-4-305917 (1992-10-01), None
patent: A-5-62877 (1993-03-01), None
patent: A-05-062877 (1993-03-01), None
patent: A-06-124873 (1994-05-01), None
patent: A-07-220990 (1995-08-01), None
patent: A-7-220990 (1995-08-01), None
patent: A-08-316125 (1996-11-01), None
patent: A-9-184787 (1997-07-01), None
patent: A-09-184787 (1997-07-01), None
patent: A-10-160582 (1998-06-01), None
patent: A-10-303114 (1998-11-01), None
patent: A-10-340846 (1998-12-01), None
patent: A-11-176727 (1999-07-01), None
patent: A-11-297615 (1999-10-01), None
patent: A-2000-058436 (2000-02-01), None
patent: A-2000-58436 (2000-02-01), None
patent: A-2000-097616 (2000-04-01), None
patent: A-2002-071513 (2002-03-01), None
patent: A-2002-71513 (2002-03-01), None
patent: A-2002-071514 (2002-03-01), None
patent: A-2002-250678 (2002-09-01), None
patent: A-2002-296005 (2002-10-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 99/60361 (1999-11-01), None
patent: WO 99/060361 (1999-11-01), None
patent: WO 02/090905 (2002-11-01), None
patent: WO 02/091078 (2002-11-01), None
patent: WO 03/077037 (2003-09-
Gemma Takashi
Ichihara Yutaka
Ishii Mikihiko
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Projection optical system inspecting method and inspection... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Projection optical system inspecting method and inspection..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection optical system inspecting method and inspection... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4243268