Contact with plural beams

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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07808261

ABSTRACT:
To precisely control behavior of a probe at a portion near a contact, and to provide a probe with small electric capacity which can be used to inspect chips having high-speed and high-capacity signals. A parallel spring probe based on a principle of a link mechanism, the link mechanism including: a vertically extending vertical probe; and a plurality of linear or curved horizontal beams extending in a direction perpendicular to the vertical direction, the beams being fastened to a fixed end at one ends and connected to the vertical probe at the other ends, characterized in that distance between at least a pair of adjacent horizontal beams varies along a direction perpendicular to the vertical direction.

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patent: 2000-338133 (2000-12-01), None

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