Optics: measuring and testing – By light interference – Spectroscopy
Reexamination Certificate
2006-01-12
2010-06-08
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
Spectroscopy
C356S451000
Reexamination Certificate
active
07733493
ABSTRACT:
The invention relates to a Fourier transform spectrometer comprising a binary grating with variable depth, the grating comprising a first set of mirrors and a second set of mirrors, the mirrors of the first set of mirrors and the mirrors of the second set of mirrors being arranged in an alternating order and at least one of the sets of mirrors being carried by fingers of a comb structure of a wafer, the spectrometer further comprising an actuator for prompting a motion of the second set of mirrors and a detector for detecting a radiation reflected by the grating, the mirrors being orientated in a plane defined by said wafer and said motion of the second set of mirrors being given by a translation in a direction vertical to said wafer plane.
REFERENCES:
patent: 5841579 (1998-11-01), Bloom et al.
patent: 6181458 (2001-01-01), Brazas et al.
patent: 6204925 (2001-03-01), Prikryl et al.
patent: 6894836 (2005-05-01), Christenson
patent: 2003/0203530 (2003-10-01), Lee et al.
patent: 2004/0001257 (2004-01-01), Tomita et al.
patent: 2005/0237617 (2005-10-01), Carr et al.
patent: 2007/0146720 (2007-06-01), Cox et al.
Manzardo, Omar, “Micro-sized Fourier Spectrometers”, PhD Thesis, University of Neuchatel, Neuchatel Switzerland, (2002), 133 pgs.
Manzardo, Omar, et al., “Infrared MEMS- based Lamellar Grating Spectrometer”, Proceedings of the SPIE, SPIE, Bellingham, VA. vol. 5455, (Apr. 29, 2004), 1-8.
Bhalotra et al.,Optical Mems, 2000 IEEE/LEOS International Conference, 93-94 (2000). XP-010518553.
Hoffmann et al.,Infrared Physics, 17: 451-456 (1977). XP-002376795.
Manzardo et al.,Optics Letters, 29[13]: 1437-1439 (2004). XP-002376793.
Noell et al.,IEEE J. Sel. Top. Quantum Electronics, 8[1]: 148-154 (2002). XP-002376794.
Ataman et al., “A Fourier Transform Spectrometer Using Resonant Vertical Comb Actuators,”J. Micromech. Microeng., 16: 2517-2523 (2006).
Ataman Calgar
Urey Hakan
Chowdhury Tarifur
Fraunhofer-Gesellschaft zur Forderung der ange-wandten Forschung
Hansen Jonathan M
Leydig , Voit & Mayer, Ltd.
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