Silicon crystallization apparatus and silicon...

Details Silicon crystallization apparatus and silicon... Silicon crystallization apparatus and silicon...

2004-12-23

2010-06-01

Elve, M. Alexandra (Department: 3742)

Electric heating

Metal heating

By arc

C219S121850, C219S121600

Reexamination Certificate

active

07728256

ABSTRACT:
A novel silicon crystallization apparatus and a silicon crystallization method renders it is possible to form alignment key without additional photolithography, and to adjust a substrate to a correct position by sensing a deviation of the substrate when the substrate is loaded. The silicon crystallization apparatus includes a moving stage being moved in a horizontal direction, and a fixing plate provided in the moving stage, to fix a substrate. A rotating frame is provided in the moving stage, to rotate the fixing plate.

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