Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate
2007-09-11
2010-11-09
Khuu, Cindy H (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Statistical measurement
Reexamination Certificate
active
07831409
ABSTRACT:
Method and system for yield similarity of semiconductor devices. Embodiments of the present invention provides a method for yield similarity of semiconductor devices. The method includes providing a first plurality of semiconductor devices and a second plurality of semiconductor devices. The method also includes obtaining a first plurality of yields associated with a first yield related to the first plurality of semiconductor devices. The method further includes obtaining a second plurality of yields associated with a second yield related to the second plurality of semiconductor devices. The method also includes providing a processor and performing a first statistical analysis for the first plurality of yields using at least the processor. The method includes determining a first statistical distribution based on at least information associated with the first statistical analysis. The method includes performing a second statistical analysis for the second plurality of yields.
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Khuu Cindy H
Semiconductor Manufacturing International (Shanghai) Corporation
Townsend and Townsend / and Crew LLP
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