Electret capacitor type composite sensor

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal

Reexamination Certificate

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C257SE25032

Reexamination Certificate

active

07812417

ABSTRACT:
To provide a small, thin and light-weighted composite sensor which can also detect light together with sound, vibration, pressure or acceleration by a single sensor.An electret capacitor type composite sensor is constituted by a casing11, an electrode12, a hole portion (which is a sound hole and also a light introduction hole)22, a spacer31, a vibration plate41having light transmissibility, a vibration plate ring42, a printed board6and a semiconductor element61. Further, a photoelectric conversion portion having a function of photoelectric effect is provided at a portion of the surface of the semiconductor element61, light is conducted to the photoelectric conversion portion via the hole portion22and the vibration plate41having light transmissibility, and an electric signal generated by the photoelectromotive force is taken out independently from an electric signal generated by the change of the electrostatic capacitance of the electret capacitor.

REFERENCES:
patent: 4972099 (1990-11-01), Amano et al.
patent: 5753983 (1998-05-01), Dickie et al.
patent: 2004/0113058 (2004-06-01), Sonoki
patent: 2009/0267168 (2009-10-01), Sawada
patent: 1-196518 (1989-08-01), None
patent: 4-291606 (1992-10-01), None
patent: 2000-075046 (2000-03-01), None
patent: 2001-083004 (2001-03-01), None
patent: 2004-191087 (2004-07-01), None
patent: 2004-354199 (2004-12-01), None
patent: 2005-191208 (2005-07-01), None
Extended European Search Report issued in European Patent Application No. EP 07 73 7538, dated Apr. 21, 2010.

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