Interferometry method for ellipsometry, reflectometry, and...

Details Interferometry method for ellipsometry, reflectometry, and... Interferometry method for ellipsometry, reflectometry, and...

2008-07-16

2010-10-12

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07812963

ABSTRACT:
A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

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