Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1991-09-13

1992-05-26

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 52, 355 76, 0 3B 2742

Patent

active

051172550

ABSTRACT:
An exposure apparatus for exposing on a substrate a pattern formed on a mask, comprises a projection optical system for forming the pattern on a predetermined focusing plane and projecting an image of the pattern on the substrate located to be substantially aligned with the focusing plane, driving means for three-dimensionally moving the mask or at least one of a plurality of optical system, or for inclining the mask or said at least one of the plurality of optical members with respect to a plane substantially perpendicular to an optical axis of the projection optical system and correcting means for driving the driving means to anisotropically change optical characteristics of the projection optical system so that the projected image of the pattern is matched with a pattern already formed on the substrate.

REFERENCES:
patent: 3980405 (1976-09-01), Tatsuno et al.
patent: 4629313 (1986-12-01), Tanimoto
patent: 4650983 (1987-03-01), Suwa
patent: 4704202 (1987-11-01), Murakami et al.
patent: 4734746 (1988-03-01), Ushida et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 4788577 (1988-11-01), Akiyama et al.
patent: 4871237 (1989-10-01), Angai et al.
patent: 5008702 (1991-04-01), Tanaka et al.

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