MEMS device having support structures configured to minimize...

Details MEMS device having support structures configured to minimize... MEMS device having support structures configured to minimize...

2006-08-18

2010-06-29

Le, Uyen-Chau N (Department: 2874)

Optical waveguides

Temporal optical modulation within an optical waveguide

Reexamination Certificate

active

07747109

ABSTRACT:
Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another.

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