Energy analyzer and spectrometer for low-energy electrons

Details Energy analyzer and spectrometer for low-energy electrons Energy analyzer and spectrometer for low-energy electrons

1989-08-29

1991-04-16

Anderson, Bruce C.

Radiant energy

Electron energy analysis

250397, H01J 4000

Patent

active

050085352

ABSTRACT:
An energy analyzer for Auger electrons can be simply formed by means of a glass tube provided with a helical layer of ruthenium oxide. The loss in energy resolution which occurs upon detection outside the focal plane can be electronically compensated for by detecting the electrons by means of a segmented anode.

REFERENCES:
patent: 3626184 (1971-12-01), Crewe
patent: 3818228 (1974-06-01), Palmberg
patent: 4126781 (1978-11-01), Siegel
patent: 4584474 (1986-04-01), Franchy et al.
patent: 4742224 (1988-05-01), Chu et al.
patent: 4831267 (1989-05-01), Brunner
patent: 4849629 (1989-07-01), Daimon et al.

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