Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2007-12-21
2010-11-02
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C257S444000, C257S443000, C257SE27133, C438S057000, C438S048000
Reexamination Certificate
active
07824949
ABSTRACT:
A method of forming a sensor array. The method includes depositing a source/drain contact layer; depositing a semiconductor layer on the source/drain contact layer; and patterning the source/drain contact layer and the semiconductor layer substantially simultaneously, wherein the patterned semiconductor layer forms part of a sensor of the sensor array.
REFERENCES:
patent: 5619033 (1997-04-01), Weisfield
patent: 6717152 (2004-04-01), Izumi
patent: 6856670 (2005-02-01), Hoheisel
patent: 7078702 (2006-07-01), Ringermacher et al.
patent: 2002/0089026 (2002-07-01), Lu et al.
patent: 2004/0016886 (2004-01-01), Ringermacher et al.
patent: 2006/0194357 (2006-08-01), Hsu et al.
P.I. Hsu, R. Bhattacharya, H. Gleskova, M. Huang, Z. Xi, Z. Suo, S. Wagner, and J.C. Sturm; Thin-film Transistor Circuits on Large-Area Spherical Surfaces; Applied Pyhysics Letters; vol. 81; No. 9; Aug. 26, 2002, pp. 1723-1725.
Pai-Hui Iris Hsu; A Dissertation Presented to the Faculty of Princeton University in Candidacy for the Degree of Doctor of Philosophy; Three-Dimensional Electronic Surfaces, Nov. 2003, 129 pages including title pages.
Limb Scott J.
Lujan René A.
Sambandan Sanjiv
Wong William S.
Ligai Maria
Marger Johnson & McCollom PC
Palo Alto Research Center Incorporated
Pham Thanh V
LandOfFree
Structure and method for flexible sensor array does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Structure and method for flexible sensor array, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Structure and method for flexible sensor array will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4225802