Semiconductor laser element and manufacturing method thereof

Details Semiconductor laser element and manufacturing method thereof Semiconductor laser element and manufacturing method thereof

2005-03-16

2010-11-30

Harvey, Minsun (Department: 2828)

Coherent light generators

Particular active media

Semiconductor

C372S036000, C372S043010, C372S044010, C372S046012

Reexamination Certificate

active

07843983

ABSTRACT:
In an element wherein a plurality of ridges (16, 36) are arranged in parallel, supports (17, 37) are formed to sandwich each of the ridges (16, 36). More specifically, on an outer side of the ridge (16) in the element, the first support (17a) is formed, and on an inner side in the element, the second support (17b) is formed. On an outer side of the ridge (36) in the element, the first support (37a) is formed, and on an inner side in the element, the second support (37b) is formed. Thus, even when a resist is applied on an element surface and spin-coating is performed at the time of manufacturing the element, the resist on the inner side than the ridges (16, 36) in the element can be prevented from flowing into a groove between the ridges to a certain extent by means of the second supports (17b, 37b), and a resist film thickness on the inner sides of the ridges (16, 36) in the element can be prevented from being considerably small compared with that on the outer sides in the element.

REFERENCES:
patent: 5963572 (1999-10-01), Hiroyama et al.
patent: 6075800 (2000-06-01), Spear
patent: 6199561 (2001-03-01), Mitsuhashi
patent: 6411642 (2002-06-01), Mazed
patent: 6618420 (2003-09-01), Gen-Ei et al.
patent: 2002/0024985 (2002-02-01), Takeuchi et al.
patent: 2002/0028390 (2002-03-01), Mazed
patent: 2003/0231685 (2003-12-01), Nakamura et al.
patent: 2302791 (1999-04-01), None
patent: 2304795 (1999-04-01), None
patent: 1021749 (2000-07-01), None
patent: 11-145558 (1999-05-01), None
patent: 2001-230498 (2001-08-01), None
patent: 2001-517866 (2001-10-01), None
International Search Report of PCT/JP2005/004699, date of mailing Jun. 21, 2005.
Korean Office Action dated Dec. 14, 2007, issued in corresponding Korean Application No. 10-2006-7018977.

Affiliated with

Also associated with

Rating

Semiconductor laser element and manufacturing method thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor laser element and manufacturing method thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor laser element and manufacturing method thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4225563