Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate
2005-08-08
2010-02-02
Paik, Sang Y (Department: 3742)
Electric heating
Heating devices
With power supply and voltage or current regulation or...
C219S444100
Reexamination Certificate
active
07655886
ABSTRACT:
When a heating plate performs heat treatment on a substrate by a wireless wafer provided with a temperature detecting portion, a storing portion and a controller, the temperature of the heating plate is measured readily and accurately while suppressing lowering of a heating operation efficiency due to a measuring operation. A temperature measurement start instruction is provided to the controller of the wireless wafer at a position in a wireless wafer carrier, and thereby the wireless wafer starts temperature detection to store time-series data of the detected temperature value in the storing portion. The wireless wafer is transferred to a heating unit through a predetermined transfer path. Based on a transportation time required for placing the wireless wafer on the heating plate and the time-series data of the detected temperature value in the storing portion, the time-series data of the detected temperature value obtained after the wireless wafer is placed on the heating plate is fetched.
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Austrian Patent Office Search Report issued on Nov. 6, 2008.
Asai Ryuji
Tomita Hiroshi
Paik Sang Y
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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