Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-01-19
2010-11-23
Duda, Kathleen (Department: 1795)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S077000, C356S498000, C356S508000, C356S614000
Reexamination Certificate
active
07839485
ABSTRACT:
Positional information of a movable body in a Y-axis direction is measured using an interferometer and an encoder whose short-term stability of measurement values excels when compared with the interferometer, and based on the measurement results, a predetermined calibration operation for obtaining correction information for correcting measurement values of the encoder is performed. Accordingly, by using measurement values of the interferometer, correction information for correcting the measurement values of the encoder whose short-term stability of the measurement values excels the interferometer is obtained. Then, based on the measurement values of the encoder and the correction information, the movable body is driven in the Y-axis direction with good precision.
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Duda Kathleen
Nikon Corporation
Oliff & Berridg,e PLC
Sullivan Caleen O
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