Scanning pattern drawing apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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358494, H01J 314

Patent

active

051171066

ABSTRACT:
A scanning pattern drawing apparatus which scans the surface of a workpiece with a light beam so that a pattern is described on the workpiece with the issued light beam being controlled on the basis of pattern drawing data stored in a pattern memory, wherein the pattern drawing apparatus is able to read many pieces of data in a short period of time even if the frequency of the timing pulses is reduced and which therefore is capable of drawing a precise pattern on a workpiece. A scanning pulse generator produces as scanning pulse in response to a predetermined amount of scanning with the light beam. The scanning pulse is converted to a plurality of resulting timing pulses, and successive parallel outputs of the timing pulses are produced after delaying by a predetermined time. The pattern drawing data is read from the pattern memory in response to the delayed timing pulses.

REFERENCES:
patent: 4285012 (1981-08-01), Ohara et al.
patent: 4837588 (1989-06-01), Imakawa et al.
patent: 4853535 (1989-08-01), Suganuma
patent: 4855761 (1989-08-01), Hiiro
patent: 4858019 (1989-08-01), Ohara et al.

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