Piezoelectric actuator, method of manufacturing...

Details Piezoelectric actuator, method of manufacturing... Piezoelectric actuator, method of manufacturing...

2006-06-22

2010-06-08

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000

Reexamination Certificate

active

07732984

ABSTRACT:
The piezoelectric actuator comprises: a substrate; a constraint force buffering layer which is formed on the substrate and made of a hardness control material having low hardness; and a piezoelectric element which is formed directly on the constraint force buffering layer.

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T. Yoshimura et al., Piezoelectric Properties of Ferroelectric Epitaxial Films with High Curie Temperature, Transactions on Sensors and Micromachines, Apr. 2004, pp. 117-123, vol. 124E-No. 4, Institute of Electrical Engineers of Japan.

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