Laser drawing method and apparatus

Details Laser drawing method and apparatus Laser drawing method and apparatus

2008-01-16

2010-10-26

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave directional modulation

Reexamination Certificate

active

07821703

ABSTRACT:
A method of laser drawing includes steps of causing laser light from a light source to be incident to an acousto-optical diffraction element, and deflecting the light incident to the element by changing a frequency of a high frequency signal to be inputted to the element to diffract the light, thereby changing a diffraction angle of the diffracted light, and condensing the diffracted light emerging from the element on an object to be processed as an optical spot, thereby scanning the object with the optical spot. A diffracted light intensity control table for controlling a light intensity of the diffracted light so as to be constant independent of the diffraction angle of the diffracted light is prepared in advance, and in the deflecting step, the light intensity of the diffracted light is controlled based on the diffracted light intensity control table.

REFERENCES:
patent: 5279775 (1994-01-01), Thomas et al.
patent: 5334849 (1994-08-01), Thomas et al.
patent: 2003/0164358 (2003-09-01), Ward
patent: 2005/0170572 (2005-08-01), Hongo et al.
patent: 2005/0237895 (2005-10-01), Tanaka et al.
patent: 2004-087962 (2004-03-01), None
Sandstrom and Tison: “Highly accurate pattern generation using acousto-optical deflection”; SSpie/optical/laser microlithography IV, vol. 1463, Jul. 1991, pp. 629-637.

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