Micromirror system

Details Micromirror system Micromirror system

2007-12-07

2010-11-30

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

07843620

ABSTRACT:
A micromirror system having at least two micromirrors, each suspended on a substrate wafer via at least one torsion spring. The axes of rotation of the micromirrors are disposed essentially perpendicular to each other in order to permit deflection of an optical beam in two directions essentially perpendicular to each other. The micromirrors and the torsion springs are patterned out of the substrate wafer and lie essentially in one plane.

REFERENCES:
patent: 5417312 (1995-05-01), Tsuchitani et al.
patent: 6088145 (2000-07-01), Dickensheets et al.

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