Substrate holding apparatus

Details Substrate holding apparatus Substrate holding apparatus

2008-03-24

2010-06-15

Tadesse, Yewebdar T (Department: 1713)

Coating apparatus

Work holders, or handling devices

C118S050000, C118S052000, C204S297030

Reexamination Certificate

active

07735450

ABSTRACT:
A substrate processing unit includes: a vertically-movable substrate holder for holding a substrate; a pan surrounding a periphery of the substrate holder; a cell, located below the substrate holder and within the pan, having in its interior a chemical processing section; and a cell cover, capable of closing a top opening of the cell, having a plurality of spray nozzles for separately spraying at least two types of processing liquids, wherein the pan and the cell each have an individual liquid discharge line.

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