Invertible front opening unified pod

Details Invertible front opening unified pod Invertible front opening unified pod

2007-09-24

2010-12-28

Lowe, Michael S (Department: 3652)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S711000, C211S041180, C414S217000, C414S416020, C414S810000, C414S941000

Reexamination Certificate

active

07857139

ABSTRACT:
A front opening unified pod (FOUP) for holding wafers is invertible and compatible with process machines in an inverted orientation. The FOUP can safely transport and store wafers while in a non-upright orientation. The shelves within the FOUP are capable of collapsing and constraining the wafers. Further, a method of holding wafers for processing is provided.

REFERENCES:
patent: 5960959 (1999-10-01), Wu et al.
patent: 6427096 (2002-07-01), Lewis et al.
patent: 6573522 (2003-06-01), Elliott et al.
patent: 6981594 (2006-01-01), Sarver
patent: 2008/0273959 (2008-11-01), Bunod et al.
patent: 07161805 (1995-06-01), None
patent: 2000355392 (2000-12-01), None
patent: WO2007147120 (2007-06-01), None

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