Projection exposure apparatus with luminous flux distribution

Details Projection exposure apparatus with luminous flux distribution Projection exposure apparatus with luminous flux distribution

1995-01-20

2010-02-02

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000

Reexamination Certificate

active

07656504

ABSTRACT:
An exposure system is provided for illuminating a fine pattern that may have features extending along orthogonal first and second linear directions. An illumination source may be provided having decreased intensity portions at a center and defined along the first and second directions.

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“Illuminator Mod

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