Method for making a photoelectric conversion device using an amo

Details Method for making a photoelectric conversion device using an amo Method for making a photoelectric conversion device using an amo

1989-05-24

1991-04-16

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG26, 148DIG152, 437 62, 437 83, 437 90, 437976, 357 30, H01L 2120, H01L 3118

Patent

active

050082060

ABSTRACT:
A photoelectric conversion apparatus comprising a transistor having a main electrode area of one conductive type semiconductor and a control electrode area of an opposite conductive type semiconductor, and a capacitor for controlling the potential of the control electrode area in floating state in which carriers produced optically are stored in the control electrode area by controlling the potential of the control electrode area via the capacitor. The apparatus comprises a multilayered structure in which switching device for setting the control electrode area to a desired potential is formed on a layer different from that on which the transistor and capacitor are formed.

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T. Yonehara, et al., "Competing Processes of Si Molecular Beam Reactive Etching and Simultaneous Deposition on Film and Bulk SiO.sub.2 ", Journal of Applied Physics, vol. 53, No. 10, pp. 6839-6843 (Oct. 1982).

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