Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2010-03-01
2010-12-14
Thompson, Timothy J (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000
Reexamination Certificate
active
07852544
ABSTRACT:
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
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Office Action
Chui Clarence
Kothari Manish
Miles Mark W.
Sampsell Jeffrey Brian
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
Thompson Timothy J
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