Microlithographic reduction projection catadioptric objective

Details Microlithographic reduction projection catadioptric objective Microlithographic reduction projection catadioptric objective

2007-03-14

2010-12-28

Allen, Stephone B (Department: 2872)

Optical: systems and elements

Compound lens system

With curved reflective imaging element

C359S730000

Reexamination Certificate

active

07859748

ABSTRACT:
A photolithographic reduction projection catadioptric objective includes a first optical group having an even number of at least four mirrors and having a positive overall magnifying power, and a second substantially refractive optical group more image forward than the first optical group having a number of lenses. The second optical group has a negative overall magnifying power for providing image reduction. The first optical group provides compensative aberrative correction for the second optical group. The objective forms an image with a numerical aperture of at least substantially 0.65, and preferably greater than 0.70 or still more preferably greater than 0.75.

REFERENCES:
patent: 2380887 (1945-07-01), Warmisham
patent: 3244073 (1966-04-01), Bouwers et al.
patent: 3762801 (1973-10-01), Baker
patent: 4103990 (1978-08-01), Yamada
patent: 4171871 (1979-10-01), Dill et al.
patent: 4232969 (1980-11-01), Wilczynski
patent: 4241390 (1980-12-01), Markle et al.
patent: 4293186 (1981-10-01), Offner
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4398809 (1983-08-01), Canzek
patent: 4443068 (1984-04-01), Itoh
patent: 4469414 (1984-09-01), Shafer
patent: 4482219 (1984-11-01), Canzek
patent: 4595295 (1986-06-01), Wilczynski
patent: 4666259 (1987-05-01), Iizuka
patent: 4685777 (1987-08-01), Hirose et al.
patent: 4701035 (1987-10-01), Hirose
patent: 4711535 (1987-12-01), Shafer
patent: 4757354 (1988-07-01), Sato et al.
patent: 4779966 (1988-10-01), Friedman
patent: 4812028 (1989-03-01), Matsumoto et al.
patent: 4834515 (1989-05-01), Mercado
patent: 4861148 (1989-08-01), Sato et al.
patent: 4951078 (1990-08-01), Okada
patent: 5004331 (1991-04-01), Haseltine et al.
patent: 5031976 (1991-07-01), Shafer
patent: 5052763 (1991-10-01), Singh et al.
patent: 5063586 (1991-11-01), Jewell et al.
patent: 5071240 (1991-12-01), Ichihara et al.
patent: 5078502 (1992-01-01), Cook
patent: 5089913 (1992-02-01), Singh et al.
patent: 5114238 (1992-05-01), Sigler
patent: 5153898 (1992-10-01), Suzuki et al.
patent: 5159172 (1992-10-01), Goodman et al.
patent: 5212588 (1993-05-01), Viswanathan et al.
patent: 5220590 (1993-06-01), Bruning et al.
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5315629 (1994-05-01), Jewell et al.
patent: 5323263 (1994-06-01), Schoenmakers
patent: 5353322 (1994-10-01), Bruning et al.
patent: 5401934 (1995-03-01), Ainsworth, Jr. et al.
patent: 5410434 (1995-04-01), Shafer
patent: 5477304 (1995-12-01), Nishi
patent: 5488229 (1996-01-01), Elliott et al.
patent: 5515207 (1996-05-01), Foo
patent: 5537260 (1996-07-01), Williamson
patent: 5575207 (1996-11-01), Shimizu
patent: 5592329 (1997-01-01), Ishiyama et al.
patent: 5608526 (1997-03-01), Piwonka-Corle et al.
patent: 5636066 (1997-06-01), Takahashi
patent: 5650877 (1997-07-01), Phillips et al.
patent: 5652679 (1997-07-01), Freeman
patent: 5684636 (1997-11-01), Chow et al.
patent: 5686728 (1997-11-01), Shafer
patent: 5694241 (1997-12-01), Ishiyama et al.
patent: 5717518 (1998-02-01), Shafer et al.
patent: 5729376 (1998-03-01), Hall et al.
patent: 5734496 (1998-03-01), Beach
patent: 5742436 (1998-04-01), Furter
patent: 5802335 (1998-09-01), Sturlesi et al.
patent: 5805346 (1998-09-01), Tomimatsu
patent: 5805357 (1998-09-01), Omura et al.
patent: 5805365 (1998-09-01), Sweatt
patent: 5815310 (1998-09-01), Williamson
patent: 5835275 (1998-11-01), Takahashi et al.
patent: 5861997 (1999-01-01), Takahashi
patent: 5917879 (1999-06-01), Mashima
patent: 5940222 (1999-08-01), Sinclair et al.
patent: 5956192 (1999-09-01), Williamson
patent: 5999310 (1999-12-01), Shafer et al.
patent: 6008885 (1999-12-01), Takahashi et al.
patent: 6014252 (2000-01-01), Shafer
patent: 6033079 (2000-03-01), Hudyma
patent: 6084724 (2000-07-01), Wiegand et al.
patent: 6097537 (2000-08-01), Takahashi et al.
patent: 6142641 (2000-11-01), Cohen et al.
patent: 6169627 (2001-01-01), Schuster
patent: 6169637 (2001-01-01), Tsunashima
patent: 6172825 (2001-01-01), Takahashi et al.
patent: 6185049 (2001-02-01), Terada et al.
patent: 6188513 (2001-02-01), Hudyma et al.
patent: 6195213 (2001-02-01), Omura et al.
patent: 6213610 (2001-04-01), Takahashi et al.
patent: 6255661 (2001-07-01), Braat et al.
patent: 6259510 (2001-07-01), Suzuki
patent: 6262845 (2001-07-01), Sweatt
patent: 6285737 (2001-09-01), Sweatt et al.
patent: 6353470 (2002-03-01), Dinger
patent: 6426506 (2002-07-01), Hudyma
patent: 6451507 (2002-09-01), Suenaga et al.
patent: 6473243 (2002-10-01), Omura
patent: 6600608 (2003-07-01), Shafer et al.
patent: 6631036 (2003-10-01), Schuster
patent: 6636350 (2003-10-01), Shafer et al.
patent: 6731374 (2004-05-01), Sewell
patent: 6750948 (2004-06-01), Omura
patent: 6757051 (2004-06-01), Takahashi et al.
patent: 6822727 (2004-11-01), Shima
patent: 6829099 (2004-12-01), Kato et al.
patent: 6842298 (2005-01-01), Shafer et al.
patent: 6873476 (2005-03-01), Shafer et al.
patent: 6912042 (2005-06-01), Shafer
patent: 6995886 (2006-02-01), Hendriks
patent: 6995918 (2006-02-01), Terasawa
patent: 7030965 (2006-04-01), Takahashi
patent: 7075726 (2006-07-01), Terasawa et al.
patent: 7079314 (2006-07-01), Suenaga et al.
patent: 7085075 (2006-08-01), Mann et al.
patent: 7092168 (2006-08-01), Terasawa et al.
patent: 7187503 (2007-03-01), Rostalski et al.
patent: 7190530 (2007-03-01), Mann et al.
patent: 7218445 (2007-05-01), Shafer et al.
patent: 7224520 (2007-05-01), Mitchell
patent: 7237915 (2007-07-01), Hudyma
patent: 7239453 (2007-07-01), Terasawa et al.
patent: 2002/0024741 (2002-02-01), Terasawa et al.
patent: 2002/0176063 (2002-11-01), Omura
patent: 2003/0197922 (2003-10-01), Hudyma
patent: 2003/0234912 (2003-12-01), Omura
patent: 2003/0234992 (2003-12-01), Shafer
patent: 2004/0012866 (2004-01-01), Mann et al.
patent: 2004/0160677 (2004-08-01), Epple et al.
patent: 2004/0240047 (2004-12-01), Shafer et al.
patent: 2005/0036213 (2005-02-01), Mann et al.
patent: 2005/0179994 (2005-08-01), Webb
patent: 2005/0190435 (2005-09-01), Shafer et al.
patent: 2005/0225737 (2005-10-01), Weissenrieder et al.
patent: 2006/0012885 (2006-01-01), Beder et al.
patent: 2006/0066962 (2006-03-01), Totzeck et al.
patent: 2006/0077366 (2006-04-01), Shafer
patent: 2006/0082905 (2006-04-01), Shafer et al.
patent: 2006/0119750 (2006-06-01), Epple et al.
patent: 2006/0198018 (2006-09-01), Shafer et al.
patent: 2006/0221456 (2006-10-01), Shafer et al.
patent: 2006/0244938 (2006-11-01), Schuster
patent: 2007/0037079 (2007-02-01), Omura
patent: 2007/0091451 (2007-04-01), Schuster
patent: 2007/0109659 (2007-05-01), Rostalski et al.
patent: 2007/0165198 (2007-07-01), Kneer et al.
patent: 197 26 058 (1998-01-01), None
patent: 197 26 058 (1998-01-01), None
patent: 19726058 (1998-01-01), None
patent: 196 39 586 (1998-04-01), None
patent: 103 32 122 (2005-01-01), None
patent: 10 2005 056 721 (2006-11-01), None
patent: 0 267 766 (1988-05-01), None
patent: 0736789 (1996-10-01), None
patent: 0 779 528 (1997-06-01), None
patent: 0 604 093 (1997-11-01), None
patent: 0 869 383 (1998-10-01), None
patent: 0 816892 (1999-06-01), None
patent: 0 951 054 (1999-10-01), None
patent: 0 962 830 (1999-12-01), None
patent: 0989434 (2000-03-01), None
patent: 1 069 448 (2000-07-01), None
patent: 1 059 550 (2000-12-01), None
patent: 1 067 448 (2001-01-01), None
patent: 1 098 215 (2001-10-01), None
patent: 1 318 425 (2003-06-01), None
patent: 1 336 887 (2003-08-01), None
patent: 3246615 (1991-11-01), None
patent: 5-175098 (1993-07-01), None
patent: 6-188169 (1994-07-01), None
patent: 8-166542 (1995-06-01), None
patent: 8-330220 (1996-12-01), None
patent: 9-148241 (1997-06-01), None
patent: 10-163099 (1998-06-01), None
patent: 10-214783 (1998-08-01), None
patent: 10-284408 (1998-10-01), None
patent: 10-303114 (1998-11-01), None
patent: 2000-505958 (2000-05-01), None
patent: 2001-228401 (2001-08-01), None
patent: 2002-208551 (2002-07-01), None
patent: 2002-372668 (2002-12-01), None
patent: 2003-114387 (2003-04-01), None
patent: 2003-307680 (2003-10-01), None
patent: 2004-317534 (2004-11-01), None
patent: 2004-333761 (2004-11-01), None
patent: 2005-003982 (2005-01-01), None
patent: WO 92/05462 (1992-04-01), None
patent: WO 94/0604

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