Titania-doped quartz glass and making method, EUV...

Details Titania-doped quartz glass and making method, EUV... Titania-doped quartz glass and making method, EUV...

2009-07-30

2010-12-14

Rosasco, Stephen (Department: 1795)

Glass manufacturing

Processes

With shaping of particulate material and subsequent fusing...

C430S005000

Reexamination Certificate

active

07849711

ABSTRACT:
A titania-doped quartz glass containing 3-12 wt % of titania at a titania concentration gradient less than or equal to 0.01 wt %/μm and having an apparent transmittance to 440 nm wavelength light of at least 30% at a thickness of 6.35 mm is of such homogeneity that it provides a high surface accuracy as required for EUV lithographic members, typically EUV lithographic photomask substrates.

REFERENCES:
patent: 6479195 (2002-11-01), Kirchauer et al.
patent: 2002/0043080 (2002-04-01), Best et al.
patent: 2003/0226377 (2003-12-01), Barrett et al.
patent: 2004/0045318 (2004-03-01), Hrdina et al.
patent: 2005/0245383 (2005-11-01), Iwahashi et al.
patent: 2008/0274869 (2008-11-01), Englisch et al.
patent: 1063203 (2000-06-01), None
patent: 9-59034 (1997-03-01), None
patent: 97/10182 (1997-03-01), None
patent: 03/077038 (2003-09-01), None
patent: 2004/089838 (2004-10-01), None
patent: 2005/114328 (2005-12-01), None
V. S. Khotimchenko et al.; “Determining the Content of Hydrogen Dissolved in Quartz Glass Using the Methods of Raman Scattering and Mass Spectrometry”, Zurnal Priladnoi Spectroskopii, vol. 46, No. 6, pp. 987-991, Jun. 1987.
European Search Report dated Apr. 16, 2007, issued in corresponding European Patent Application No. 06256239.

Affiliated with

Also associated with

Rating

Titania-doped quartz glass and making method, EUV... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Titania-doped quartz glass and making method, EUV..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Titania-doped quartz glass and making method, EUV... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4206830