Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2007-05-15
2010-06-08
Tan, Vibol (Department: 2819)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
Reexamination Certificate
active
07733198
ABSTRACT:
A microfabricated bulk wave acoustic bandgap device comprises a periodic two-dimensional array of scatterers embedded within the matrix material membrane, wherein the scatterer material has a density and/or elastic constant that is different than the matrix material and wherein the periodicity of the array causes destructive interference of the acoustic wave within an acoustic bandgap. The membrane can be suspended above a substrate by an air or vacuum gap to provide acoustic isolation from the substrate. The device can be fabricated using microelectromechanical systems (MEMS) technologies. Such microfabricated bulk wave phononic bandgap devices are useful for acoustic isolation in the ultrasonic, VHF, or UHF regime (i.e., frequencies of order 1 MHz to 10 GHz and higher, and lattice constants of order 100 μm or less).
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El-Kady Ihab F.
Fleming James G.
Fleming, legal representative Carol
McCormick Frederick
Olsson Roy H.
Bieg Kevin W.
Hammond Crystal L
Sandia Corporation
Tan Vibol
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