Piezoelectric driven MEMS device

Details Piezoelectric driven MEMS device Piezoelectric driven MEMS device

2007-03-08

2010-06-08

Budd, Mark (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S317000, C310S319000, C310S332000

Reexamination Certificate

active

07732990

ABSTRACT:
A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

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Korean Office Action dated Feb. 23, 2009 corresponding to U.S. Appl. No. 11/683,755, filed Mar. 8, 2007.

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