Gallium nitride heterojunction schottky diode

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Between different group iv-vi or ii-vi or iii-v compounds...

Reexamination Certificate

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C257S471000, C257S472000

Reexamination Certificate

active

07842974

ABSTRACT:
A gallium nitride based semiconductor diode includes a substrate, a GaN layer formed on the substrate, an AlGaN layer formed on the GaN layer where the GaN layer and the AlGaN layer forms a cathode region of the diode, a metal layer formed on the AlGaN layer forming a Schottky junction therewith where the metal layer forms an anode electrode of the diode, and a high barrier region formed in the top surface of the AlGaN layer and positioned under an edge of the metal layer. The high barrier region has a higher bandgap energy than the AlGaN layer or being more resistive than the AlGaN layer.

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Z. Z. Bandić et al., “High voltage (450 V) GaN schottky rectifiers,” Applied Physics Letters, vol. 74, No. 9, Mar. 1, 1999, pp. 1266-1268.
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T. G. Zhu et al., “High-voltage mesa-structure GaN Schottky rectifiers processed by dry and wet etching,” Applied Physics Letters, vol. 77, No. 18, Oct. 30, 2000, pp. 2918-2920.

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