Substrate processing apparatus and substrate housing method

Details Substrate processing apparatus and substrate housing method Substrate processing apparatus and substrate housing method

2006-03-16

2010-06-29

Crawford, Gene (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S228000, C414S935000

Reexamination Certificate

active

07747343

ABSTRACT:
A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate processing apparatus; a fourth step of returning the substrate after the third step to the housing case by the transport means; a second step of calculating a difference in amount in relation to a normal position of the substrate at the transport means from the first step and before the fourth step; and a fifth step of adjusting a returning position of the substrate in the housing case after the third step and until the fourth step.

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patent: WO 02/21589 (2002-03-01), None

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