Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-06-27
2010-02-02
Phan, Thiem (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S825000, C029S846000, C029S874000, C200S181000, C200S244000, C200S253100, C333S105000, C333S262000, C335S078000
Reexamination Certificate
active
07653985
ABSTRACT:
Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
REFERENCES:
patent: 5121089 (1992-06-01), Larson
patent: 5351412 (1994-10-01), Furuhata et al.
patent: 5418418 (1995-05-01), Hirano et al.
patent: 6046659 (2000-04-01), Loo et al.
patent: 6331257 (2001-12-01), Loo et al.
patent: 6496612 (2002-12-01), Ruan et al.
patent: 6509670 (2003-01-01), Jeong et al.
patent: 6798315 (2004-09-01), Schaefer
patent: 6831542 (2004-12-01), Volant et al.
patent: 7138893 (2006-11-01), Nakanishi et al.
patent: 2004/0164825 (2004-08-01), Volant et al.
Harness, T., et al., “Characteristic Modes of Electrostatic Comb-Drive X-Y Microactuators,”J. Micromech. Microeng., vol. 9, 1-8 (1999).
Hyman, D., et al., “GaAs-Compatible Surface-Micromachined RF MEMS Switches,”Electronics Letters, vol. 35, No. 3, pp. 1-2 (Feb. 4, 1999).
Sun, Xi-Qing, et al., “A Bistable Microrelay Based on Two-Segment Multimorph Cantilever Actuators,”The Eleventh Annual International Workshop on Micro-Electro Mechanical SystemsI, pp. 154-159 (Jan. 25-29, 1998).
Chang David T.
Hsu Tsung-Yuan
Schaffner James H.
Schmitz Adele E.
Boeing
HRL Laboratories LLC
Ladas & Parry
Phan Thiem
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