Probe card for testing semiconductor devices

Details Probe card for testing semiconductor devices Probe card for testing semiconductor devices

2006-06-01

2010-12-28

Tang, Minh N (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S757020, C324S758010

Reexamination Certificate

active

07859280

ABSTRACT:
A probe card is disclosed that is easily assembled and maintained and configured to prevent the controlled level of a space transformer from changing due to various causes such as a thermal deformation during a test process. The probe card includes an installation member where probe tips are provided and a printed circuit board (PCB) disposed on the installation member. A reinforcement member is fixed to a top surface of the PCB, and a contact member is disposed between the PCB and the reinforcement member. The contact member and the installation member are fixed by a connect member inserted into an insert hole formed at the PCB, and a control bolt provided for controlling the level of the installation member is inserted into control holes formed at the installation member, the PCB, and the reinforcement member sequentially in a bottom-to-top direction. Due to a convex-up top surface of the contact member, the contact member continues to contact the reinforcement member even though the installation member and the contact member are inclined while controlling the level of the installation member.

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International Search Report and Written Opinion for PCT/KR2006/002100 dated Aug. 26, 2006.

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