Fishing – trapping – and vermin destroying
Patent
1991-10-09
1992-05-26
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437228, 437233, 148DIG30, 148DIG35, 118 50, 118715, 427 69, 427 70, 4272481, H01L 2100, H01L 2102, H01L 2131, C23C 1600
Patent
active
051167840
ABSTRACT:
Si.sub.2 H.sub.6 and PH.sub.3 are introduced into a heated reaction tube in which a plurality of substrates are contained under vacuum pressure, thereby forming phosphor-doped silicon films on the substrates. By changing the flow of Si.sub.2 H.sub.6, a first layer consisting of a silicon film containing phosphor of low density, a second layer substantially consisting of phosphor, and a third layer consisting of substantially the same composition as that of the first layer are deposited in the order mentioned. Thereafter, the first through third layers are heated, thereby diffusing phosphor contained in the second layer. Thus, an integral film of uniform impurity density is formed from the first through third layers.
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Everhart B.
Hearn Brian E.
Tokyo Electron Limited
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