Method and apparatus for processing a fine pattern

Details Method and apparatus for processing a fine pattern Method and apparatus for processing a fine pattern

1989-12-22

1992-05-26

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437225, 148DIG45, H01L 21302, H01L 21326

Patent

active

051167824

ABSTRACT:
A method and apparatus for processing a fine pattern of a sample of one of an electronic device, molecular device and bioelement device, wherein a needle having a sharpened tip is disposed in opposed relation to the sample with a gap therebetween. A voltage is applied between the needle and the sample so as to enable a tunnel current and/or a field emission current to flow therebetween and the fine pattern is provided to correct the fine pattern by effecting at least one of removal, repositioning, annealing and film formation of at least one of individual atoms and individual molecules.

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Hansma, P. K. et al., "Scanning Funneling Microscopy", J. Appl. Phys., vol. 61, No. 2, pp. R1-R23, Jan. 15, 1987.
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Ehrichs, E. E. et al, "Direct Writing with the Scanning Tunneling Microscope", J. Vac. Sci. Tech. A, vol. 6, No. 2, Mar./Apr. 1988, pp. 540-543.
McCord, M. A. et al, "Lithography . . . Microscope", J. Vac. Sci. Tech. B, vol. 4, No. 1, Jan./Feb. 1986, pp. 86-88.
Abraham, D. W. et al., "Surface Modification . . . Tunneling Microscope", IBM J. Res Develop., vol. 30, No. 5, Sep. 1986, pp. 492-499.
Gomer, R., "Possible Mechanisms . . . Tunneling Microscopy", IBM J. Res. Develop., vol. 30, No. 4, Jul. 1986, pp. 428-430.

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