Plasma generating electrode and plasma reactor

Details Plasma generating electrode and plasma reactor Plasma generating electrode and plasma reactor

2004-07-07

2010-06-01

Wilkins, III, Harry D (Department: 1795)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

With means applying electromagnetic wave energy or...

C422S186000, C204S164000

Reexamination Certificate

active

07727488

ABSTRACT:
A plasma generating electrode1of the present invention includes two or more electrodes2disposed to face each other, and holding members3for holding electrodes2at a predetermined interval, and can generate plasma by applying voltage between electrodes2. At least one of electrodes facing each other2has a plate-shaped ceramic body6serving as a dielectric body, and a conductive film7disposed inside the body6, and the holding members3fix the opposite side end portions5(fixed end portions5a) of electrodes facing each other2in the state of a cantilever in such a condition that electrodes2are held by holding members in the state of cantilevers of the different directions alternately at a predetermined interval as a whole. This relaxes the thermal stress and effectively prevents distortion and breakage of electrodes caused by to a temperature change.

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