Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2005-05-06
2010-06-15
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S072000, C414S941000
Reexamination Certificate
active
07738081
ABSTRACT:
A lithographic apparatus can include an illumination system that conditions a radiation beam, a patterning device that modulates the radiation beam, a substrate table that supports a substrate, and a projection system that projects the modulated radiation beam onto a target portion of the substrate. The lithographic apparatus can also include a substrate handler that loads and/or unloads a substrate on/from the substrate table. The substrate handler supports the substrate in a support plane and can include a conveyor device for moving the substrate in a direction substantially parallel to the support plane. The conveyor device can include a gripping device configured to push or pull the substrate in the indicated direction and a driving device for driving the gripping device in the indicated direction.
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ASML Netherlands B.V.
Kim Peter B
Liu Chia-how Michael
Sterne, Kessler, Goldstein & Fox P.L.L.C
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