Thin film transistor and flat panel display device

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...

Reexamination Certificate

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C257S408000, C257S409000

Reexamination Certificate

active

07821007

ABSTRACT:
A thin film transistor, a method of fabricating the same, and a flat panel display device including the same, are provided. According to the method, low resistance regions and high resistance regions can be manufactured through one doping process. The thin film transistor includes: a substrate; a semiconductor layer disposed on the substrate and including source and drain regions, high resistance regions smaller than the source and drain regions, a channel region, and connection regions disposed between the high resistance regions and the channel region; a gate insulating layer disposed on the semiconductor layer; a gate electrode disposed on the gate insulating layer above the channel region; an interlayer insulating layer disposed on the gate electrode; and source and drain electrodes disposed on the interlayer insulating layer and electrically connected to the source and drain regions, respectively.

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