Micromachine structure

Details Micromachine structure Micromachine structure

2006-04-06

2010-06-22

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S223100, C359S317000

Reexamination Certificate

active

07742219

ABSTRACT:
A micro-mechanical structure according to the present invention includes: a base1; an elastic supporting member5having elasticity, the elastic supporting member5being formed on the base1; and a movable section supported by the elastic supporting member5so as to be capable of making a relative move with respect to the base1. This movable section includes a movable electrode6opposing the base1via a first gap, and a mirror8being affixed to the movable electrode6via a vertical rib7.

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Veljko Milanovic et al.; “Tip-Tilt-Piston Actuators for High Fill-Factor Micromirror Arrays”; Solid-State sensor, Actuator and Microsystems Workshop; Jun. 6-10, 2004; Adriatic Research Institute; pp. 232-237 (cited in [0007], p. 4 of the description).
PCT/ISA/237 and partial translation.
Chinese Office Action for corresponding Application No. 200680008131.8 dated Feb. 6, 2009.

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