Optics: measuring and testing – Of light reflection
Reexamination Certificate
2006-12-11
2010-06-15
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
Of light reflection
Reexamination Certificate
active
07738105
ABSTRACT:
Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, or the like systems.
REFERENCES:
patent: 3874797 (1975-04-01), Kasai
patent: 4210401 (1980-07-01), Batten
patent: 4332476 (1982-06-01), Stenberg et al.
patent: 4647207 (1987-03-01), Bjork et al.
patent: 4681450 (1987-07-01), Azzam
patent: 4790659 (1988-12-01), Erman et al.
patent: 5229833 (1993-07-01), Stewart
patent: 5343293 (1994-08-01), Berger et al.
patent: 5764365 (1998-06-01), Finarov
patent: 5963327 (1999-10-01), He et al.
patent: 5969818 (1999-10-01), Johs et al.
patent: 6414302 (2002-07-01), Freeouf
patent: RE38153 (2003-06-01), Finarov
patent: 6714301 (2004-03-01), Otsuki et al.
patent: 6753962 (2004-06-01), Opsal et al.
patent: 6795184 (2004-09-01), Herzinger et al.
patent: 7489400 (2009-02-01), He et al.
patent: 2002/0159063 (2002-10-01), Kanzaki
patent: 2004/0085538 (2004-05-01), Hovinen et al.
patent: 2006/0126079 (2006-06-01), Bareket et al.
He Ping
Liphardt Martin M.
Welch James D.
Stafira Michael P
Welch James D.
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