Coating processes – With post-treatment of coating or coating material – Heating or drying
Reexamination Certificate
2007-04-25
2010-12-21
Ahmed, Shamim (Department: 1713)
Coating processes
With post-treatment of coating or coating material
Heating or drying
C438S095000, C438S102000, C438S104000
Reexamination Certificate
active
07854963
ABSTRACT:
The present invention relates to method and apparatus for preparing thin films of semiconductor films for radiation detector and photovoltaic applications. In one aspect, the present invention is directed to a method of forming a Cu(In,Ga)(S,Se)2layer with substantially uniform Ga distribution. In a particular aspect, the method includes depositing a precursor film on the base, the precursor film including Cu, In and Ga, sulfurizing the precursor film thus forming a sulfurized precursor layer with a substantially uniform Ga distribution, and selenizing the sulfurized precursor layer to reduce the sulfur concentration therein and obtain the Cu(In,Ga)(S,Se)2layer with substantially uniform Ga distribution. In a further aspect, the method also includes the step of selenizing the precursor film.
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Ahmed Shamim
Pillsbury Winthrop Shaw & Pittman LLP
SoloPower, Inc.
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