Lithographic apparatus, device manufacturing method,...

Details Lithographic apparatus, device manufacturing method,... Lithographic apparatus, device manufacturing method,...

2004-08-31

2010-02-16

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Lens or reflective image former testing

C430S030000, C355S077000

Reexamination Certificate

active

07663741

ABSTRACT:
To calibrate a lithographic apparatus contrast in the aerial image is measured for a plurality of different settings of available manipulators of the projection system. Appropriate settings of the manipulators are determined as those giving the maximum contrast values.

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