Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate
2007-10-03
2010-02-16
Sefer, A. (Department: 2893)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
C257S301000, C257S350000, C257S379000, C257S532000, C257SE21252, C257SE21274, C257SE21311, C438S243000, C438S957000
Reexamination Certificate
active
07663241
ABSTRACT:
A semiconductor device comprises a substrate, a first conductive film, a first insulation film, a second insulation film, a second conductive film, and a third conductive film. The first conductive film is formed on the substrate. The first insulation film is formed on the first conductive film and has a first opening. The first opening is formed as having multiple crossing trenches each having a predetermined width. The second insulation film is formed on the sides and bottom of the first opening. The second conductive film is formed on the second insulation film in the interior of the first opening. The third conductive film is formed on the second insulation film and the second conductive film.
REFERENCES:
patent: 6391707 (2002-05-01), Dirnecker et al.
patent: 7476922 (2009-01-01), Won et al.
patent: 2003/0183862 (2003-10-01), Jin et al.
patent: 2004/0097034 (2004-05-01), Sandhu et al.
patent: 2005/0063140 (2005-03-01), Hackler et al.
patent: 2006/0157766 (2006-07-01), Won et al.
patent: 2003-031691 (2003-01-01), None
patent: 2003-133414 (2003-05-01), None
Washio et al. “A 0.2-μm 180-GHz-fmax 6.7-ps-ECL SOI/HRS Self-Aligned SEG SiGe HBT/CMOS Technology for Microwave and High-Speed Digital Applications”, IEEE International Electron Devices Meeting (IEDM), pp. 741-742, 2000.
Oki Electric Industry Co. Ltd.
Rabin & Berdo P.C.
Sefer A.
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