Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate
2005-03-11
2010-12-28
Cosimano, Edward R (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Measured signal processing
C356S237100, C356S237200, C356S237500, C356S600000, C702S081000
Reexamination Certificate
active
07860686
ABSTRACT:
A structure, decomposable into at least one elementary structure or base element, is illuminated and then provides an optical response, at least one geometrical parameter of the base element is determined, and a value is attributed to it, a regression algorithm is implemented which determines modified values of the parameter(s), in order to make the difference between the theoretical response of the base element and the acquired result at most equal to a threshold, and to obtain an image of the structure, and as long as the separation between the acquired and theoretical responses is not satisfactory, new subdivisions of the base element(s) are performed.
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Commissariat a l''Energie Atomique
Cosimano Edward R
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
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