Solution treatment apparatus and solution treatment method

Details Solution treatment apparatus and solution treatment method Solution treatment apparatus and solution treatment method

2009-05-04

2010-06-15

Griffin, Walter D (Department: 1797)

Liquid purification or separation

Automatic control

Responsive to rotation

C438S478000, C427S240000

Reexamination Certificate

active

07736498

ABSTRACT:
In the present invention, a plurality of exhaust paths connected to a plurality of cup bodies surrounding substrate holding portions respectively are joined together for common use, and the openings of exhaust rate adjustment sections provided on the exhaust paths are adjusted with reference to data in which combinations of the numbers of rotations of the substrate holding portions are associated with combinations of set exhaust rates of the exhaust paths when solution treatment is performed by rotating the substrate by the substrate holding portion. According to the present invention, the cup body can be exhausted at an intended exhaust rate at all times independently of the state where the substrate in which cup body is subjected to which process.

REFERENCES:
patent: 5876280 (1999-03-01), Kitano et al.
patent: 6159541 (2000-12-01), Sakai et al.
patent: 6715943 (2004-04-01), Nagamine
patent: 6752872 (2004-06-01), Inada et al.
patent: 7547614 (2009-06-01), Matsuoka et al.
patent: 2000-156341 (2000-06-01), None

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